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6-15
Maintenance and Troubleshooting
Integral Support Mount
(for 6- to 8-in. wafer meters)
6. Remove access cover. (See Figure 6-11.)
FIGURE 6-11. Integral Support Tube Assembly.
7. Proceed to step 8.
8. Loosen and remove the sensor nut from the sensor cavity with a
1
1
/8-inch open end wrench. (Use a
3
/4-inch open end wrench for 3-
and 4-inch [80 and 100 mm] SST wafers.)
9. Lift the sensor from the sensor cavity. Be very careful to lift the
sensor straight up. Do not rock, twist, or tilt the sensor during
removal; this will damage the engagement diaphragm.
Support Tube
Wafer Meter
Body
Sensor Nut
Sensor
Sensor Cable
Nut
Access Cover