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Series 820 Instruction Manual Appendix B Specifications
IM-82-C B-1
Appendix B Product Specifications
Operating Specifications
Gases Most gases; check compatibility with wetted materials; specify when ordering
Mass Flow Rates Models 822/824: 0 to 10 sccm to 0 to 50 slpm;
Models 826/827: 0 to 75 slpm to 0 to 175 slpm;
Models 822-S/824-S: 0 to 10 sccm to 0 to 500 slpm;
flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg
and 21°C (70°F); other ranges in other units are available (e.g. scfh or
nm
3
/h)
Gas Pressure Models 822/824:150 psig ( 10 barg) maximum, 20 psig (1.4 barg) optimum
Models 826/827: 150 psig ( 10 barg) maximum, 20 psig (1.4 barg) optimum
Models 822-S/824-S: 1000 psig (68.9 barg) maximum for low flow bodies only;
500 psig (34 barg) maximum; 20 psig (1.4 barg) optimum
Gas & Ambient Temperature
32° to 122°F (0 to 50°C); higher available on special order
Leak Integrity Models 822/824, 826/827: 1 X 10
-4
atm cc/sec of helium maximum
Models 822-S/824-S: 5 X 10
-9
atm cc/sec of helium maximum
Pressure Drop Models 822/824:
Flow Rate cm of Water mbar in H
2
O
100 sccm 0.06 0.06 0.024
1 slpm 0.6 0.59 0.236
10 slpm 6.0 5.88 2.36
20 slpm 24.0 23.5 9.45
30 slpm 54.0 53 21.3
40 slpm 96.0 94.7 37.8
50 slpm 130.0 127.4 51.2
Models 826/827: Two inches of mercury maximum at 175 slpm
822/824-S (low).........0.08 psi (0.006 bar or 6 cm of water) differential max;
15 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max
822/824-S (med).......0.08 psi (0.006 bar or 6 cm of water) differential max;
100 slpm: 1.5 psi (0.10 bar or 105 cm of water) differential max
822/824-S (high)........0.08 psi (6 mbar or 6 cm of water) differential max;
300, 400 and 500 slpm: 2 psi (0.14 bar or 140 cm of water)
differential maximum
Power Requirements 12 to 18 VDC nominal, 100 mA maximum; 24 VDC optional
Output Signal Linear 0-5 VDC, 1000 Ohms minimum load resistance
Linear 4-20 mA, 30-500 Ohms maximum loop resistance
Display 3.5 digit LCD (0.6 in H); remote mounting option available