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Appendix A Series 820 Instruction Manual
A-8 IM-82-C
Actual Gas
Chemical
Symbol
K-factor
Relative N2
Cp
(Cal/g)
Density
(g/l) @ 0°C
Elastomer
O-ring*
Methyl Mercaptan CH
3
SH .52 .2459 2.146
Methyl Trichlorosilane (CH
3
) SiCl
3
.25 .164 6.669
Molybdenum Hexafluoride MoF
6
.21 .1373 9.366
Monoethylamine C
2
H
5
NH
2
.35 .387 2.011
Monomethylamine CH
3
NH
2
.51 .4343 1.386
Neon NE 1.46 .245 .900
Nitric Oxide NO .990 .2328 1.339
Nitrogen N
2
1.000 .2485 1.25
Nitrogen Dioxide NO
2
.74 .1933 2.052
Nitrogen Trifluoride NF
3
.48 .1797 3.168
Nitrosyl Chloride NOCl .61 .1632 2.920
Nitrous Oxide N
2
O .71 .2088 1.964
Octafluorocyclobutane
(Freon-C318)
C
4
F
6
.17 .185 8.397
Oxygen Difluoride OF
2
.63 .1917 2.406
Oxygen O
2
1.000 .2193 1.427
Ozone O
3
.446 .3 2.144
Pentaborane B
5
H
9
.26 .38 2.816
Pentane C
5
HI
2
.21 .398 3.219
Perchloryl Fluoride CIO
3
F .39 .1514 4.571
Perfluoropropane C
3
F
8
.174 .197 8.388
Phosgene COCl
2
.44 .1394 4.418
PhosphinePH3 .76 .237 1.517
Phosphorous Oxychloride POCl
3
.36 .1324 6.843
Phosphorous Pentafluoride PH
5
.30 .1610 5.620
Phosphorous Trichloride PCl
5
.30 .1250 6.127
Propane C
3
H
8
.36 .3885 1.967
Propylene C
3
H
6
.41 .3541 1.877
Silane SiH
4
.60 .3189 1.433
Silicon Tetrachloride SiCl
4
.28 .1270 7.580
Silicon Tetrafluoride SiF
4
.35 .1691 4.643
Sulfur Dioxide So
2
.69 .1488 2.858
Sulfur Hexafluoride SF
6
.26 .1592 6.516
Sulfuryl Fluoride SO
2
F
2
.39 .1543 4.562
Teos .090 KR
Tetrafluorahydrazine N
2
F
4
.32 .182 4.64
Trichlorofluormethane
(Freon-11)
CCl
3
F .33 .1357 6.129
Trichlorisilane SiHCl
3
.33 .1380 6.043
1,1,2-Trichloro-1,2,2
CCl
2
FCClF
2
.20 .161 8.360
Trifluorethane (Freon-113)
Trisobutyl Aluminum (C
4
H
9
)Al .061 .508 8.848
Titanium Tetrachloride TiCl
4
.27 .120 8.465
Trichloro Ethylene C
2
HCl
3
.32 .163 5.95
Trimethylamine (CH
3
)
3
N .28 .3710 2.639
Tungsten Hexasfuoride WF
6
.25 .0810 13.28 KR
Uranium Hexafluoride UF
6
.20 .0888 15.70
Vinyl Bromide CH
2
CHBr .46 .1241 4.772
Vinyl Chloride CH
2
CHCl .48 .12054 2.788
Xenon Xe 1.44 .0378 5.858
* If no O-ring material is specified then O-ring to be used is Viton