A SERVICE OF

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7. SERVO PARAMETERS
7.4 MDS-R-Vx
II - 203
No. Items Details Setting range
F E D C B A 9 8
ovsn
7 6 5 4 3 2 1 0
zeg
bit Meaning when "0" is set Meaning when "1" is set
0
1
2
3
4
5 zeg
Z phase normal edge
detection (normal)
Z phase reverse edge detection
(Valid only when SV027/bit6=1)
6
7
8
9
A
B
C
D
E
F
ovsn
Set the non-sensitive band of the overshooting compensation type
3 in increments of 2µm at a time.
In the feed forward control, the non-sensitive band of the model
position droop is set, and overshooting of the model is ignored.
Set the same value as the standard SV040.
2234 SV034
SSF3
Servo
function
selection 3
(Note) Set to "0" for bits with no particular description.