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6.4 CD Measurement Function (Option)
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(c) In measurement with the SEM data manager, use an image under the same SEM
parameters as the image to be measured.
(d) Set measurement parameters such as measurement mode and type of measurement
on the CD Measurement or Measurement Condition window. When Manual
measurement mode is selected, calibration can be performed in both X and Y-axis
directions.
For calibration in the Auto measurement mode, parameters should be set beforehand
on the auto measurement parameter setting window.
(e) Click the Calibration Edit button on the CD Measurement window to open the
Calibration window.
Fig. 6.4-18 Calibration Window
(f) Specify a No. to be registered in the Entry No. combo box.
(g) Enter into the Caption box a caption that will facilitate call-out.