A SERVICE OF

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4.1 Maintenance of Electron Optical Column
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(4) Turn the knob for the BSED (backscattered electron detector) mechanical unit to pull out
the BSED detector, and insert the aperture replacement tool through the stage opening to
remove the orifice unit.
Fig. 4.1-27 Removing the Orifice Unit (1)
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the orifice maintenance.
Tool
Turn the knob
BSED detecto
r
Ob
j
ective lens
Orifice uni
t