6.3 Specification of S-3400N External Communication (Option)
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6.3 Specification of S-3400N External Communication (Option)
6.3.1 About the External Communication of S-3400N
The external communication of S-3400N is the software that controls S-3400N from the external
controller with the Ethernet.
Fig. 6.3-1 Diagram of the External Communication of S-3400N
6.3.1.1 Communication Procedure
DCOM (Distributed Component Object Model) is used as the communication procedure.
The external communication operates by the ActiveX component and the remote server (ActiveX
EXE format).
6.3.1.2 Function and Limitation
Property command (Table 6.3-1) and Method command (Table 6.3-2) and Event command
(Table 6.3-3) can be used.
(1) Control of the specimen stage.
• Only the Stage Coordinate (mechanical coordinates) is available. See 3.5.7.1
Coordinate Notation.
• Movable Range of the specimen stage is limited mutually with present location of the
stage and the state of option detector insertion, the specimen size.
This information is not output by the external communication. When the specimen stage
cannot move to the specified position, the error information will be replied.
(2) Others
Do not use any other Property/Method/Event which command are not described in this
manual.
SEM PC
SEM application
SemCommunication
DCOM
EDX PC
EDX application
Ethernet (TCP/IP)
Stage control
Column control
SEM
