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5.856
,037s,993 1.44
KR
,120s
2.766
.46
KR
.I241 4.772
.46
.0668
15.70 KR.20
KR
Teflon
13.26
0610
.25
.3710
2.639
KR.26
KFI
,163 5.95.32
KR
.120 6.465
.27
,506
6.648
KR.061
KR
,161
6.360
.20
X0
A’
N,
Xenon
CH&HCl
N,
Vinyl Chloride
CH,CHBr
N,
Vinyl Bromide
“Fe
N1
Uranium Hexafluoride
WF,
Hexasfuoride
N,
Tungsten
(CH,),N
Trimethylamine
N,C,HCI,
Trichloro
Ethylene
N,
T’ZI,
Tetrachloride
N,
Titanium
(C,H#
Trisobutyl
Aluminum
13)
Ttifluorethane
(Freon-l
N,CCl,FCClF,
1,1.2-Ttichloro-lv2.2
.1360
6.043
KR
.33
N*
SiHCI,
Trichlorisilane
(Freon-ll)
.1357
6.129
KR.33N,
KFI
.,a2
4.64
.32
N,
KR KR
,090
NZ
.1543
4.562
KR.39N,
.(592 6.516
KR.26
N,
.1466
2.656
KR.69N,
.1691
4.643
KR.35N,
.1270 7.560
KR.26
N,
3169
1.433 KR.60
N*
.a77 KR
1
.3541
41
NZ
1.967 KR
3665
.36
NZ
.1250
6.127
KR.30
N,
.1810
5.620
KR.30N,
,132’
6.643
KR
.36
Y
,237’
1.517
KR
N,
1.070
KR.1394
4.416
.44N,
KR
,197 6.366
,174
N,
,151’
4.571 KR.39
N,
,396
3.219
KR
21
N,
KR.36
2.616
.26
N1
.3
2.144
,446N,
.2193 1.427
Y
1.000
.1917 2.406
.63N,
,165
6.397
KR.17
Y
CCI,FTtichlo ’ofluormelhans
NSF,
Tetrafluorahydrazine
TeoS
SO,F,
Sulfuryi
Fluoride
SiF
so:
Sulfur Dioxide
Sulfur Hexafluoride
SF,
Telrafluoride
Silica
Tetrachlofids
SiCLSilicon
SiHSilane
C,“,
Propylene
C,H,
PCI,
Propane
TrichlorideF’hosphomus
Pentalluoride
PH,
POCI,
Phosphorous
Oxychloride
PH,
Phosphorous
COCI,
Phosphine
Phosgene
C,F,
Pe’fl”o’op’opane
CIOaF
Perchloryi
Fluoride
4H’z
Pentane
B,H,
Pentaborane
0,
0,
Ozone
Difluodde
OF,
Oxygen
(Freon-Csr 6)
Oxygen
C,F,Octafluorqclobutane
O-ring ’ Valv e
Seat
A(&
N,
Gas
(Calfg)
Ref.
Ral.
to
Rel. to
Efaatornu
Symbol Gas
DenSityK-fsc.
Cp
K-faC.
Raf.
Gas
Chemical
Actual