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140-072011 200/202 Series Page 5 of 24
1.2. Specifications HFM-200
*
Accuracy
1
and Linearity ........................................................................................................................±1% F.S.
Repeatability .....................................................................................................................................±0.05% F.S.
Standard Pressure Rating ....................................................................................................................... 500 psig
Pressure Coefficient.............................................................................. -0.0067%/psi (0 - 1000 psig N2) typical
High-Pressure Option ................................................................................................... Proof tested to 1500 psig
Leak Integrity ..................................................................................................................................< 1x10
-9
sccs
Temperature Coefficient .................................................................................. Zero ±0.035% FS/°C (0 - 60°C)
........................................................................................................................ Span ±0.05% RDG/°C (0 - 60°C)
STP .........................................................................................................................................0°C and 760 Torr
Power (±15 Volt flow meter) .................................................................. ±(14-16) VDC @ ±30 mA (< 1 Watt)
Power (24 Volt flow meter).......................................................................................(14 - 32) VDC < 1.9 Watts
Flow Signal ................................................................................. (inherently linear) 0 - 5.00 VDC or 4 - 20 mA
Wetted Material
2
.........................................................................................316 SS, Viton®, 82/18 Au/Ni Braze,
................................................................................................................................................ Trace Silver Solder
Connector ....................................................................................... 15-pin subminiature D / (9-pin for 24 Volt)
Fittings ..............................................................................................................¼ in. Swagelok
®
, others available
Weight (approx.) ......................................................................................................................... 1.8 lb (0.82 kg)
1.3. Specifications HFC-202
*
Accuracy
1
and Linearity .........................................................................................................................±1% F.S.
Repeatability......................................................................................................................................±0.05% F.S.
Std. Pressure Rating ................................................................................................................................ 500 psig
High Pressure Option ................................................................................................... Proof tested to 1500 psig
Pressure Coefficient .............................................................................. -0.0067%/psi (0 - 1000 psig N2) typical
Control Valve DP* ................................................................................................................ per customer order
Leak Integrity ..................................................................................................................................< 1x10
-9
sccs
Temperature Coefficient 3 ............................................................................... Zero ±0.035% FS/°C (0 - 60°C)
........................................................................................................................ Span ±0.05% RDG/°C (0 - 60°C)
STP .........................................................................................................................................0°C and 760 Torr
Power (±15 Volt controller) ................................................. ±(14 - 16) VDC @ +60 mA/-185 mA (< 3 Watts)
Power (24 Volt controller)........................................................................................ (14 - 32) VDC < 4.2 Watts
Flow Signal ................................................................................. (inherently linear) 0 - 5.00 VDC or 4 - 20 mA
Command Signal ...................................................................................................... 0 - 5.00 VDC or 4 - 20 mA
Wetted Material
2
..................................................................................................316 SS, 302 SS, Nickel, Viton,
.................................................................................................82/18 Au/Ni Braze, Trace Silver Solder, Kalrez®
Connector ....................................................................................... 15-pin subminiature D / (9-pin for 24 Volt)
Fittings ................................................................................................................¼ in. Swagelok, others available
Weight (approx.) ......................................................................................................................... 1.8 lb (0.82 kg)
1 Stated accuracy is for nitrogen or other gas specific calibration and using this gas only.
2 Other materials are available. Viton is the standard O-ring option.
* Specifications may vary for instruments with ranges greater than 10 slpm.