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MX80L Series Product Manual Chapter 2 – MX80L Series Table Specifications
Parker Hannifin Corporation
13
General Table Specifications
25mm 50mm 100mm 150mm
Normal Load Capacity
8 kg 8 kg 8 kg 8 kg
Maximum Acceleration
Precision Grade 4G 4G 4G 3G
Standard Grade 5G 5G 5G 4G
Maximum Velocit
y
5.0 um resolution 1100 mm/sec 1500 mm/sec 2000 mm/sec 2000 mm/sec
1.0 um resolution 1100 mm/sec 1500 mm/sec 2000 mm/sec 2000 mm/sec
0.5 um resolution 1100 mm/sec 1500 mm/sec 1500 mm/sec 1500 mm/sec
0.1 um resolution 300 mm/sec 300 mm/sec 300 mm/sec 300 mm/sec
0.02 um resolution 60 mm/sec 60 mm/sec 60 mm/sec 60 mm/sec
0.01 um resolution 30 mm/sec 30 mm/sec 30 mm/sec 30 mm/sec
Peak Force
12.0N (2.7 lbs) 12.0N (2.7 lbs) 24.0N (5.4 lbs) 24.0N (5.4 lbs)
Continuous Force
4.0N (0.9 lbs) 4.0N (0.9 lbs) 8.0N (1.8 lbs) 8.0N (1.8 lbs)
Duty Cycle
100% 100% 100% 100%
Straightness & Flatness
Precision Grade 4 microns 4 microns 5 microns 6 microns
Standard Grade 6 microns 6 microns 10 microns 12 microns
Positional Accurac
y
Precision Grade (1)(2)(3)
0.01 um resolution 3 microns 4 microns 5 microns 5 microns
0.02 um resolution 3 microns 4 microns 5 microns 5 microns
0.1 um resolution 3 microns 4 microns 5 microns 5 microns
0.5 um resolution 4 microns 5 microns 6 microns 6 microns
1.0 um resolution 5 microns 6 microns 7 microns 7 microns
5.0 um resolution 13 microns 14 microns 15 microns 15 microns
Standard Grade (2)
0.01 um resolution 12 microns 15 microns 20 microns 20 microns
0.02 um resolution 12 microns 15 microns 20 microns 20 microns
0.1 um resolution 12 microns 15 microns 20 microns 20 microns
0.5 um resolution 12 microns 15 microns 20 microns 20 microns
1.0 um resolution 15 microns 20 microns 25 microns 25 microns
5.0 um resolution 25 microns 30 microns 35 microns 35 microns
Bi-directional Repeatabilit
y
Precision Grade (1)(2)(3)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Standard Grade (2)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Unit Mass
Precision Grade 590g 590g 1027g 1345g
Standard Grade
475g 475g 875g 1125g
Carriage Mass
Precision Grade 282g 282g 509g 676g
Standard Grade
213g 213g 405g 537g
(1) Measured at the carriage center, 35mm off mounting surface @ 20C with no load. Unit bolted to granite surface, flat to within 1 micron/300mm
(2) Total accuracy and bi-directional repeatability over full travel (peak to peak)
(3) Precision grade with slope correction value provided. Consult factory if better accuracy is required.
+/- 0.8 microns
+/- 0.5 microns
+/- 1.0 microns
+/- 2.0 microns
+/- 10.0 microns
Travel
Specifications
+/- 0.4 microns
+/- 0.4 microns
+/- 10.0 microns
+/- 0.8 microns
+/- 0.8 microns
+/- 1.5 microns
+/- 2.0 microns
Daedal Division
Irwin
,
Penns
y
lvania