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Specication Mass Meter Volumetric Meter Description
Accuracy ± 0.8% of Reading ±0.2% of Full Scale
At calibration conditions after tare
High Accuracy Option ± 0.4% of Reading ±0.2% of Full Scale
At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range
1% to 100% Full Scale Measure
Typical Response Time
10 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature
−10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Measurable Flow Rate
128% Full Scale
Maximum Pressure
125 125* PSIG
Input /Output Signal Digital
Mass, Volume, Pressure
& Temperature
Volumetric Flow RS-232 Serial
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output
Signal Secondary Analog
Mass, Volume, Pressure
or Temperature
Volumetric Flow
0-5 Vdc or 0-10Vdc or 4-
20mA
Electrical Connections 8 Pin
Mini-DIN
Supply Voltage 7 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.035Amp (+ output current on 4-20mA)
Mounting Attitude Sensitivity 0% Tare after installation
Warm-up Time
< 1 Second
Wetted Materials
303 & 302 Stainless Steel, Viton®, Silicon, RTV, Glass Reinforced Nylon,
Aluminum, Buna-N.
* Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
Technical Data for Micro Flow Mass & Volumetric Flow Meters
0-0.5SCCM Full Scale up to 0-50SCCM Full Scale
Mechanical Specications
Full Scale Flow
Mass Meter
Full Scale Flow
Volumetric Meter
Mechanical
Dimensions
Process
Connections
1
Pressure Drop
2
(PSID)
0.5SCCM up to
1SCCM
0.5CCM up to
1CCM
3.9”H x 2.4”W x 1.1”D
10-32 Female
Thread*
0.5
2SCCM up to
50SCCM
2CCM up to
50CCM
1.0
∗ Units ≤50SCCM F.S. are shipped with 10-32 Male Buna-N O-ring face seal to 1/8” Female NPT ttings.
These adaptor ttings were selected for customer convenience in process connection. It should be noted
that the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see
Accessories for the 10-32 Male to 1/8”OD compression tting.
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
ttings.
2. Lower Pressure Drops Available, please contact the manufacturer.
Dimensional Drawings: page 33