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172-082010_400 I Series Software Page 3 of 35
Table of Contents
1.....................................................................................................................................................................................3
2. OPERATING ALGORITHM...........................................................................................................................6
2.1. HARDWARE DESCRIPTION............................................................................................................................6
2.2. FLOW READING...........................................................................................................................................6
2.3. ANALOG OUTPUT........................................................................................................................................7
2.4. ANALOG SET POINT INPUT...........................................................................................................................7
2.5. FLOW ALARMS............................................................................................................................................8
2.6. TOTALIZERS ................................................................................................................................................8
2.7. SETPOINT SELECTION ..................................................................................................................................8
PID input..............................................................................................................................................................9
3. COMMANDS...................................................................................................................................................11
3.1. FLOW READING .........................................................................................................................................11
3.2. SENSOR LIST .............................................................................................................................................11
3.3. SENSOR LIST BY ITEM NUMBER .................................................................................................................12
item 1 :model......................................................................................................................................................12
item 2 :mfm config:............................................................................................................................................13
item 3 :port rate:................................................................................................................................................13
item 4 :port type:................................................................................................................................................13
item 5 :macid :...................................................................................................................................................14
item 6 :active gas inst: .......................................................................................................................................14
item 7 :flow alarm enable:.................................................................................................................................14
item 8 :flow alarm delay:...................................................................................................................................14
item 9 :flow warn enable: ..................................................................................................................................15
item 10:flow warn delay: ...................................................................................................................................15
item 11:FS volts: (read only) .............................................................................................................................15
item 12:flowing hours:.......................................................................................................................................15
item 13:temperature:..........................................................................................................................................15
item 14:precision:..............................................................................................................................................15
item 16:user zero offset:.....................................................................................................................................15
item 24:A/D#0 FS factor:...................................................................................................................................16
item 25:A/D#1 FS factor:...................................................................................................................................16
item 26:A/D#0:...................................................................................................................................................16
item 27:A/D#1:...................................................................................................................................................16
item 28:hi alarm limit:.......................................................................................................................................16
item 29:hi alarm limit:.......................................................................................................................................16
item 30:Low alarm limit: ...................................................................................................................................17
item 31:Low alarm limit: ...................................................................................................................................17
item 32:hi warn limit: ........................................................................................................................................17
item 33:hi warn limit: ........................................................................................................................................17
item 34:Low warn limit:.....................................................................................................................................17
item 35:Low warn limit:.....................................................................................................................................18
item 36:integrated flow:.....................................................................................................................................18
item 40:Sensor Voltage: (read only).................................................................................................................18
item 41:Sensor Serial Number:..........................................................................................................................18
item 42:Sensor Linear Coefficient:....................................................................................................................18
item 43:Sensor 3
rd
Order Coefficient:................................................................................................................18
item 44:Sensor 5
th
Order Coefficient:................................................................................................................19
Item 45:sensor 5 sccm span voltage...................................................................................................................19
item 46:shunt factor:..........................................................................................................................................19
item 51:DAC zero code:.....................................................................................................................................19
item 52:DAC full scale code:.............................................................................................................................19
item 54:comment................................................................................................................................................19
item 64:prod cfg:................................................................................................................................................20