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141-072011 - 201/203 Series Page 5 of 23
1.2. Specifications HFM-201/205
Accuracy
1
and Linearity ....................................................................................................... ±1% F.S.
Repeatability .................................................................................................................. ±0.05% F.S.
Standard Pressure Rating ...................................................................................................... 500 psig
Pressure Coefficient ........................................................... +0.0067%/psi (0 - 1000 psig N
2
) typical
High-Pressure Option ................................................................................ Proof tested to 1500 psig
Leak Integrity ................................................................................................................. < 1x10
-9
sccs
Temperature Coefficient ........................................................... Zero: ±0.035% FS/° C (0° - 60° C)
.................................................................................................... Span: ±0.05% FS/° C (0° - 60° C)
STP ..................................................................................................................... 0° C and 760 Torr
Power (±15 Volt flow meter) ............................................. ±(14 - 16) VDC @ ±30 mA (< 1 Watt)
Power (24 Volt flow meter) ................................................................... (14 - 32) VDC < 1.9 Watts
Flow Signal ............................................. (inherently linear) 0 - 5.00 VDC, 0 - 20 mA or 4 - 20 mA
Wetted Material
2
............ 302 SS, 316 SS, Viton®, 82/18 Au/Ni Braze, Ni 200, Trace Silver Solder
Connector ....................................................................... 15-pin subminiature D (9 pin for 24 Volt)
Fittings½-in. Swagelok
®
- 201/203 small, 3/4-in. Swagelok
®
- 201/203 large, 1” Swagelok
®
- 205/207
Weight (approx.) ................... 201L: 3.55 lb (1610 g), 201H: 3.25 lb (1470g), 205: 8.1 lb (3650 g)
1.3. Specifications HFC-203/207
Accuracy
1
and Linearity ...................................................................................................... ±1% F.S.
Repeatability .................................................................................................................. ±0.05% F.S.
Std. Pressure Rating ............................................................................................................. 500 psig
High Pressure Option ................................................................................ Proof tested to 1500 psig
Pressure Coefficient .......................................................... +0.0067%/psi (0 - 1000 psig N2) typical
Control Valve DP* ............................................................................................. Per customer order
Leak Integrity ................................................................................................................ < 1x10
-9
sccs
Temperature Coefficient ........................................................... Zero: ±0.035% FS/° C (0° - 60° C)
..................................................................................................... Span: ±0.05% FS/° C (0° - 60° C)
STP ..................................................................................................................... 0° C and 760 Torr
Power (±15 Volt flow meter) ............................................. ±(14 - 16) VDC @ ±30 mA (< 1 Watt)
Power (24 Volt flow meter) ................................................................... (14 - 32) VDC < 1.9 Watts
Flow Signal ............................................................... (inherently linear) 0 - 5.00 VDC or 4 - 20 mA
Command Signal ................................................................................... 0 - 5.00 VDC or 4 - 20 mA
Wetted Material
2
........................................................... 316 SS, Nickel, Viton, 82/18 Au/Ni Braze,
.............................................................................................................. Trace Silver Solder, Kalrez®
Connector ....................................................................... 15-pin subminiature D (9 pin for 24 Volt)
Fittings½-in. Swagelok
®
- 201/203 small, 3/4-in. Swagelok
®
- 201/203 large, 1” Swagelok
®
- 205/207
Weight (approx.) ................... 203L: 5.2 lb (2360 g), 203K: 5.15 lb (2340g), 207: 14.9 lb (6760 g)
1 Stated accuracy is for nitrogen or other gas specific calibration and using this gas only.
2 Other materials are available. Viton is the standard O-ring option.
* Consult factory for pressure ranges.