Filter
Top Products
FLOW RANGES
TABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN
LOW FLOW MASS FLOW METER/CONTROLLERS*
TABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
MEDIUM FLOW MASS FLOW METER/CONTROLLERS*
TABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
HIGH FLOW MASS FLOW METER/CONTROLLERS*
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
8
CODE scc/min [N
2
]
CODE
std liters/min [N
2
]
02 0 to 10 14 0 to 1
04 0 to 20 16 0 to 2
06 0 to 50 18 0 to 5
08 0 to 100 20 0 to 10
10 0 to 200
12 0 to 500
CODE standard liters/min [N
2
]
40 60
41 80
42 100
CODE
standard liters/min [N
2
]
23 15
24 20
26 30
27 40
28 50